Analytical Services
Eco-Snow uses a variety of analytical tools to develop new products and solve customer problems. We have time available on these tools for your use. This service is priced per FOUP or cassette of wafers. A detailed report, modified to customer requirements will be generated per wafer.
Available tools include:
KLA/Tencor® Surfscan® SP-1 TBI - particle detection on un-patterned wafers
The production – proven Surfscan® SP1 detects down to 60 nm on smooth surfaces – such as bare silicon or EPI – while providing the rough film sensitivity required for 0.13 µm process technology.
Specifications
Substrate Size: 300mm and 200mm (vacuum handling)
Material: Any opaque, polished surface that scatters = 10% of incident light
Coatings: Cu, Mo, Ta and others
Defect Sensitivity: 0.080µm to 10µm depending on surface type
Image of KLA Tencor Surfscan Report
AFM
AFM is a multimode Nanoscope IIIa manufactured by Veeco. It can accommodate samples up to 1 cm2 in size and 5 mm thick and operates in either contact or tapping modes. Its Piezo tube can scan up to 120 µm2 with 5 µm depth capability. The height resolution of the instrument is better than 10nm. However, the lateral resolution depends on the scan size and radius of curvature of the tip being used. For 2 nm meter radius of curvature tip and scan size of 1 µm, lateral resolution of 2 nm can easily be achieved.
Tencor 4500
Tencor Instruments Surfscan 4500
Substrate Size: 75mm and 100mm
Defect Sensitivity: 0.480µm to 10.24µm depending on surface type
Print
Bookmark this page