C02 Precision Cleaning



Superior Performance

Extremely fast and environmentally friendly, Eco-Snow’s "all-dry" CO2 cleaning technology offers unique advantages over conventional cleaning techniques. The Eco-Snow technology is cost effective, non-destructive, waste & residue free, and eliminates staining and corrosion without recontamination. Customers also gain a competitive advantage by having the ability to meet changing fabrication requirements with the following production advantages: superior cleaning performance, reduced cycle times, increased yield, small footprint, and lower cost of ownership.



With over 100 tools installed, Eco-Snow Systems provides CO2 precision surface process equipment for a broad range of cleaning applications.

  • MEMS
  • Solar
  • Photomask
  • Imaging Devices
  • Semiconductor
  • Compound Semiconductor
  • Disk Drive
  • Flat Panel Display (FPD)

As a leading innovator of dry CO2 technology, Eco-Snow Systems sets the standard for quality dry process cleaning solutions. The company holds over 25 U.S. patents and has R&D clean room facilities and analytical equipment to conduct process qualification and testing for customer application development.

Automation Ready

Eco-Snow Systems, is a wholly owned subsidiary of the Linde Group. Retaining partners with extensive experience in automation has enabled Eco-Snow Systems to incorporate its unique CO2 precision surface processing technology into a fully automated environment. The result is a product family of precision process equipment using superior cleaning technology that delivers high repeatability, whether as a stand-alone module, integrated into an existing system, or completely replacing a conventional cleaning process.

Eco-Snow customers often describe Eco-Snow tools as the most reliable tools in the fab. Tool availability is typically in the high 90's%.